Photolithography of 0. 4 μ m linewidth with sharp and uniform edges has been realized in terms of eliminating the standing wave and diffraction which have a negative effect on explosure resolution. 以及抗蚀剂工艺条件的改进,消除影响曝光分辨率的驻波和衍射作用,实现了边缘整齐陡直、0.4μm条宽的光刻。
Bi-directional standing wave linearly motor has many advantages, such as simply structure and driving, high spatial resolution and realizing movement in two direction. 实验验证了这种双向驻波直线电动机具有结构和驱动简单、高分辨率、可方便地实现正反向运动等特点。